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Ion bombardment of polyimide films
Home
Publications
Ion bombardment of polyimide films
Ion bombardment of polyimide films
BB
B. J. Bachman
B. J. Bachman
MV
M. J. Vasile
M. J. Vasile
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1 July 1989
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 7
(4)
,
2709-2716
https://doi.org/10.1116/1.575779
Abstract
No abstract available
Keywords
POLYIMIDE
DIANHYDRIDE
HEAVY
ETCHING
ADHESION
SPUTTERING
STRUCTURES
FUNCTION
TREATMENTS
Cited by 118 articles