Interdiffusion and compound formation in the cSi/PtSi/(TiW)/Al system
- 1 February 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 88 (1), 9-23
- https://doi.org/10.1016/0040-6090(82)90345-5
Abstract
No abstract availableKeywords
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