Preparation of titanium nitride onto molybdenum, stainless steel and carbon by gas absorption and reactive r.f. sputtering
- 31 December 1981
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 103, 273-277
- https://doi.org/10.1016/0022-3115(82)90610-9
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education
This publication has 6 references indexed in Scilit:
- The effects of substrate bias on the structural and electrical properties of TiN films prepared by reactive r.f. sputteringThin Solid Films, 1980
- Interaction of nitrided titanium with a hydrogen plasmaJournal of Nuclear Materials, 1979
- Enhanced ARE apparatus and TiN synthesisJournal of Vacuum Science and Technology, 1979
- Nitriding of titanium in a radio frequency dischargeJournal of the Less Common Metals, 1977
- Sorption of Nitrogen at Low Pressures by TitaniumJournal of Vacuum Science and Technology, 1972
- The reaction of nitrogen with titanium between 800 and 1200°COxidation of Metals, 1970