Displacement of group III, IV, V, and VI impurities in Si by the analyzing beam
- 1 February 1978
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 149 (1-3), 399-404
- https://doi.org/10.1016/0029-554x(78)90895-9
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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