Self-Assembled Porous Tantalum Oxide Prepared in H[sub 2]SO[sub 4]/HF Electrolytes
- 1 January 2005
- journal article
- Published by The Electrochemical Society in Electrochemical and Solid-State Letters
- Vol. 8 (3), J10-J12
- https://doi.org/10.1149/1.1859676
Abstract
The formation of porous on tantalum was investigated in electrolytes containing low concentrations of HF (0.15 wt %). Under optimized electrochemical conditions, porous consisting of self-assembled pore arrays with single pore diameters of and a pore spacing of forms. The pore structure and the pore distribution depend on the concentration of HF, the anodization voltage, and the time for anodic oxidation. Porous layers thick with a regular pore distribution can be formed. For thicker layers cracking and a tendency for delamination was observed. © 2005 The Electrochemical Society. All rights reserved.Keywords
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