An optimized 850 degrees C low-pressure-furnace reoxidized nitrided oxide (ROXNOX) process
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 38 (9), 2036-2041
- https://doi.org/10.1109/16.83727
Abstract
No abstract availableKeywords
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