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PLASMA DEPOSITION OF AMORPHOUS AND CRYSTALLINE SILICON: THE EFFECT OF HYDROGEN ON THE GROWTH, STRUCTURE AND ELECTRONIC PROPERTIES
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PLASMA DEPOSITION OF AMORPHOUS AND CRYSTALLINE SILICON: THE EFFECT OF HYDROGEN ON THE GROWTH, STRUCTURE AND ELECTRONIC PROPERTIES
PLASMA DEPOSITION OF AMORPHOUS AND CRYSTALLINE SILICON: THE EFFECT OF HYDROGEN ON THE GROWTH, STRUCTURE AND ELECTRONIC PROPERTIES
CT
Chuang Chuang Tsai
Chuang Chuang Tsai
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1 January 1989
book chapter
Published by
World Scientific Pub Co Pte Ltd
p.
123-147
https://doi.org/10.1142/9789814434157_0006
Abstract
No abstract available
Keywords
STRUCTURE
PLASMA
AMORPHOUS
CRYSTALLINE SILICON
ETCHING
HYDROGEN
SILANE
DEFECT
Cited by 26 articles