VHF free-free beam high-Q micromechanical resonators
- 1 September 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 9 (3), 347-360
- https://doi.org/10.1109/84.870061
Abstract
Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to achieve measured Qs as high as 8400 at VHF frequencies from 30 to 90 MHz are demonstrated in a polysilicon surface micromachining technology. The microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high-Q with high stiffness in the VHF frequency range. The free-free-beam micromechanical resonators of this paper are shown to have an order of magnitude higher Q than clamped-clamped-beam versions with comparable stiffnesses.Keywords
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