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Vapourized-Metal Cluster Ion Source for Ion Plating
Home
Publications
Vapourized-Metal Cluster Ion Source for Ion Plating
Vapourized-Metal Cluster Ion Source for Ion Plating
TT
Toshinori Takagi
Toshinori Takagi
IY
Isao Yamada
Isao Yamada
KY
Kouichi Yanagawa
Kouichi Yanagawa
MK
Masatoshi Kunori
Masatoshi Kunori
SK
Shigemitsu Kobiyama
Shigemitsu Kobiyama
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1 January 1974
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 13
(S1)
,
427
https://doi.org/10.7567/jjaps.2s1.427
Abstract
No abstract available
Keywords
ION PLATING
CLUSTER ION
VAPOURIZED METAL CLUSTER
Cited by 7 articles