GaAs micromachined widely tunable Fabry-Perot filters

Abstract
The authors present a surface-normal micromachined GaAs Fabry-Perot filter with 70 nm of continuous tuning, 19 dB extinction ratio, 4.9 V of tuning voltage, and 50 pA tuning current. The device is polarisation insensitive, can be fabricated into two-dimensional arrays, is easy to couple into fibre, and requires only two masks with no critical alignments.