Progress in monitoring thin film thickness with quartz crystal resonators
- 1 February 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 32 (1), 27-33
- https://doi.org/10.1016/0040-6090(76)90547-2
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Acoustic Wave Analysis of the Operation of Quartz-Crystal Film-Thickness MonitorsJournal of Applied Physics, 1968
- Factors influencing the accuracy of a quartz-crystal-oscillator as a thickness monitor for thin film depositionThin Solid Films, 1968
- Resonance Frequency Versus Mass Added to Quartz CrystalsPublished by Springer Nature ,1966
- Verwendung von Schwingquarzen zur W gung d nner Schichten und zur Mikrow gungThe European Physical Journal A, 1959