Energy distributions of neutral atoms and molecules sputtered from polycrystalline silver
- 1 February 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 132, 329-334
- https://doi.org/10.1016/0029-554x(76)90754-0
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- Electron cyclotron wave resonances and power absorption effects in electrodeless low pressure h.f. plasmas with a superimposed static magnetic fieldPlasma Physics, 1974
- A method for surface analysis by sputtered neutralsPhysics Letters A, 1972
- The energy distribution of sputtered atoms from goldRadiation Effects, 1972
- Energieverteilungen bei der Festkörperzerstäubung durch IonenbeschußThe European Physical Journal A, 1970
- Energy Distribution of Atoms Sputtered from Polycrystalline MetalsJournal of Applied Physics, 1969
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- Die Geschwindigkeitsverteilung von kathodenzerstäubtem KaliumThe European Physical Journal A, 1967
- Energies of neutral sputtered particlesPhysics Letters, 1966
- Geschwindigkeitsverteilung der bei der Kathodenzerstäubung von Gold ausgesandten PartikelThe European Physical Journal A, 1965
- Energy Distribution of Sputtered Cu AtomsJournal of Applied Physics, 1964