Electrical properties of high-quality ultrathin nitride/oxide stack dielectrics
- 1 January 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 46 (2), 362-368
- https://doi.org/10.1109/16.740903
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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