Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory
- 1 August 1988
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America A
- Vol. 5 (8), 1270-1280
- https://doi.org/10.1364/josaa.5.001270
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 8 references indexed in Scilit:
- Theory of optical edge detection and imaging of thick layersJournal of the Optical Society of America, 1982
- Theoretical and numerical study of a locally deformed stratified mediumJournal of the Optical Society of America, 1981
- Plane-wave expansions used to describe the field diffracted by a gratingJournal of the Optical Society of America, 1981
- Scattering calculations using a microcomputerApplied Optics, 1981
- Computation of light transmitted by a thick grating, for application to contact printingJournal of the Optical Society of America, 1974
- Diffraction by thick, periodically stratified gratings with complex dielectric constantJournal of the Optical Society of America, 1973
- Scattering from a perfectly conducting surface with a sinusoidal height profile: TE polarizationIEEE Transactions on Antennas and Propagation, 1971
- Diffraction of a Plane Wave at a Sinusoidally Stratified Dielectric GratingJournal of the Optical Society of America, 1966