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Aluminum Etching in Carbon Tetrachloride Plasmas
Home
Publications
Aluminum Etching in Carbon Tetrachloride Plasmas
Aluminum Etching in Carbon Tetrachloride Plasmas
KT
K. Tokunaga
K. Tokunaga
DH
D. W. Hess
D. W. Hess
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1 April 1980
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 127
(4)
,
928-932
https://doi.org/10.1149/1.2129789
Abstract
No abstract available
Cited by 32 articles