A new technique for evaluating SiO2 layers on an LSI device
- 31 July 1981
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 24 (7), 698-700
- https://doi.org/10.1016/0038-1101(81)90202-1
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Cathodoluminescence observation of SiO2 layers in a semiconductor deviceJournal of Applied Physics, 1980
- Cathodoluminescence study of SiO2Journal of Applied Physics, 1980