A comparison of three detectors for soft X-ray dosimetry
- 1 April 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 266 (1-3), 608-611
- https://doi.org/10.1016/0168-9002(88)90453-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Dosimetry for lithographic applicationsJournal of Vacuum Science and Technology, 1981
- Radiometric calorimetry: A review (1970 supplement)Nuclear Instruments and Methods, 1970
- Power Calorimetry of Fast-Particle BeamsReview of Scientific Instruments, 1964