Electron beam writing on a 20-Å scale in metal β-aluminas
- 15 February 1983
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 42 (4), 392-394
- https://doi.org/10.1063/1.93918
Abstract
Holes 20 Å diameter and lines 20 Å wide can be cut in sodium β-alumina, sodium β″ alumina, lithium β-alumina, potassium β-alumina, lead β-alumina, and silver β-alumina using a small focused electron probe (approximately 104 A/cm2). Drilling can proceed along any crystal direction in the specimen and can penetrate material more than 1000 Å thick maintaining the small (20 Å) diameter. The holes and lines remain stable and the specimen can be removed from the electron microscope and replaced later for further drilling or examination at reduced beam intensities.Keywords
This publication has 3 references indexed in Scilit:
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