Preparation and electrical properties of Al-AlN-Si structures
- 16 June 1972
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 11 (2), 631-635
- https://doi.org/10.1002/pssa.2210110226
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Charge Transport and Storage in Metal-Nitride-Oxide-Silicon (MNOS) StructuresJournal of Applied Physics, 1969
- The Si-SiO2Interface - Electrical Properties as Determined by the Metal-Insulator-Silicon Conductance TechniqueBell System Technical Journal, 1967
- Surface states at steam-grown silicon-silicon dioxide interfacesIEEE Transactions on Electron Devices, 1966
- Limitations of the MOS capacitance method for the determination of semiconductor surface propertiesIEEE Transactions on Electron Devices, 1965