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High-power fast-atom beam source and its application to dry etching
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High-power fast-atom beam source and its application to dry etching
High-power fast-atom beam source and its application to dry etching
FS
Fusao Shimokawa
Fusao Shimokawa
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1 July 1992
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 10
(4)
,
1352-1357
https://doi.org/10.1116/1.578252
Abstract
No abstract available
Cited by 48 articles