Surface modification layer deposition on flexible substrates by plasma-enhanced chemical vapour deposition using tetramethylsilane–oxygen gas mixture
- 30 October 2008
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 41 (22)
- https://doi.org/10.1088/0022-3727/41/22/225305
Abstract
No abstract availableThis publication has 41 references indexed in Scilit:
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