Epitaxial growth of LiNbO3-LiTaO3 thin films on Al2O3

Abstract
Epitaxial thin films of LiNbO3 and LiTaO3 were grown on sapphire substrates by the rf‐magnetron sputtering method. Structural characterization was made by several spectroscopic measurements: x‐ray diffraction, Raman scattering, and optical absorption. We obtained epitaxial thin films with lattice‐mismatched strained layers, without misfit defects which are usually created at the interface. Impurity‐ion (Nd3+ and Cr3+) doped films were also grown; these films had larger refractive indices than the pure films. Furthermore, the heteroepitaxial thin films of up to 10 alternating LiNbO3/LiTaO3 layers were successfully grown, and their periodic structures were studied by optical second‐harmonic generation.