Sensors for sub-ppm NO2 gas detection based on carbon nanotube thin films
- 4 February 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (6), 961-963
- https://doi.org/10.1063/1.1545166
Abstract
Carbon nanotubes (CNTs) deposited by plasma-enhanced chemical vapor deposition on substrates have been investigated as resistive gas sensors for Upon exposure to the electrical resistance of the CNTs was found to decrease. The maximum variation of resistance to was found at an operating temperature of around The sensor exhibited high sensitivity to gas at concentrations as low as 10 ppb, fast response time, and good selectivity. A thermal treatment method, based on repeated heating and cooling of the films, adjusted the resistance of the sensor film and optimized the sensor response to
Keywords
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