Thermophoretic effect of particle deposition on a free standing semiconductor wafer in a clean room
- 1 January 1991
- journal article
- Published by Elsevier in Journal of Aerosol Science
- Vol. 22 (1), 63-72
- https://doi.org/10.1016/0021-8502(91)90093-w
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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