A spectroscopic investigation of the reactive sputtering of aluminium
- 1 January 1971
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 7 (1), 1-10
- https://doi.org/10.1016/0040-6090(71)90009-5
Abstract
No abstract availableFunding Information
- Australian Research Council
This publication has 4 references indexed in Scilit:
- Investigation of the Sputtering of Aluminum Using Atomic-Absorption SpectroscopyJournal of Applied Physics, 1970
- The mechanism of reactive sputteringJournal of Materials Science, 1968
- Getter Sputtering for the Preparation of Thin Films of Superconducting Elements and CompoundsJournal of Applied Physics, 1964
- Special Cases of PredissociationPhysical Review B, 1945