Correlation of electrical carrier and atomic profiles of Mg implants in GaAs
- 1 September 1982
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 53 (9), 6148-6153
- https://doi.org/10.1063/1.331579
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Correlation of electrical carrier and atomic profiles of S implants in GaAsJournal of Applied Physics, 1982
- Comparative studies of Mg implants in GaAs in different annealing environmentsNuclear Instruments and Methods, 1981
- Distribution of electrically active Mg implants in GaAsJournal of Applied Physics, 1980
- Chromium redistribution during thermal annealing of semi-insulating GaAs as a function of encapsulant and implant fluenceApplied Physics Letters, 1980
- Electrical measurements and optical activation studies in Mg-implanted GaAsJournal of Applied Physics, 1979
- Mg and Be Ion Implanted GaAsJournal of Applied Physics, 1972