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Compressibility Effects in Modeling Thin Silicon Dioxide Film Growth
Home
Publications
Compressibility Effects in Modeling Thin Silicon Dioxide Film Growth
Compressibility Effects in Modeling Thin Silicon Dioxide Film Growth
PM
Paul Murray
Paul Murray
GC
G. F. Carey
G. F. Carey
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1 September 1989
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 136
(9)
,
2666-2673
https://doi.org/10.1149/1.2097541
Abstract
No abstract available
Cited by 6 articles