X-ray scattering from uniform and patterned indium tin oxide thin films
- 29 April 2003
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 36 (10A), A209-A213
- https://doi.org/10.1088/0022-3727/36/10a/343
Abstract
Grazing incidence specular and diffuse x-ray scattering have been used to measure the thickness and roughness of indium tin oxide thin films deposited on glass. The techniques have been used to calibrate the etching rate, determine the variation of the top surface roughness changes with etching time and measure non-destructively the period and atomic-scale roughness of 400 nm period gratings produced by etching after laser interferometric patterning of a photoresistive layer. The propagation of the roughness through the polymer light emitting layer has also been examined.Keywords
This publication has 12 references indexed in Scilit:
- Criteria for ITO (indium–tin-oxide) thin film as the bottom electrode of an organic light emitting diodeThin Solid Films, 2002
- ITO thin films deposited at low temperatures using a kinetic energy controlled sputter-deposition techniqueThin Solid Films, 2002
- Bragg scattering from periodically microstructured light emitting diodesApplied Physics Letters, 2000
- Characterization of structures from X-ray scattering data using genetic algorithmsPhilosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 1999
- Effect of Lateral Micro structure on Conjugated Polymer LuminescenceSynthetic Metals, 1999
- Analysis of grazing incidence X-ray diffuse scatter from Co–Cu multilayersPhysica B: Condensed Matter, 1998
- Picosecond Time-Resolved Photoluminescence of PPV DerivativesSynthetic Metals, 1997
- Principles and Performance of a PC-Based Program for Simulation of Grazing Incidence X-Ray Reflectivity ProfilesMRS Proceedings, 1991
- A Grazing Incidence X-Ray Reflectometer for Rapid Nondestructive Characterization of Thin Films and InterfacesMRS Proceedings, 1991
- X-ray and neutron scattering from rough surfacesPhysical Review B, 1988