Low pressure chemical vapour (BPOVD) of Al and AlSi alloy films : MJ Cooke,Department of Electrical Engineering, University of Swansea, Swansea, UK

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30 April 1984

journal article
abstracts
Published by Elsevier in Vacuum

Vol. 34 (3-4), 488
https://doi.org/10.1016/0042-207x(84)90089-7

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Cited by 1 article