Dependence of Energy Dispersion on Ion Mass Effused from an RF Plasma
- 1 January 1970
- journal article
- Published by Physical Society of Japan in Journal of the Physics Society Japan
- Vol. 28 (1), 269
- https://doi.org/10.1143/jpsj.28.269
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Energy Distribution of Positive Ions Extracted from anRFPlasmaJournal of the Physics Society Japan, 1969