Composite Si/C/N powder production by laser induced gas phase reactions

Abstract

Ultrafine amorphous Si/C/N ternary powders have been prepared in a CO₂ laser assisted process. We demonstrate the possibility to drive the C/N ratio in the powder by properly choosing the experimental conditions and the gaseous reactant ratio in the initial mixture containing silane, dimethylamine, and ammonia. A kinetic model that accounts for reaching the equilibrium between the gaseous reaction intermediates and the solid products is proposed.