A cadmium sulfide-silicon composite resonator

1 January 1968

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE

Vol. 56 (10), 1748-1749
https://doi.org/10.1109/PROC.1968.6733

Abstract

A cadmium sulfide-silicon composite resonator is discussed which could be used as a tuning device in silicon integrated circuits. The structure and fabrication of these devices are described, together with some measured electrical characteristics.

Keywords

SILICON
ACOUSTIC DEVICES
RESONANCE
FREQUENCY
CADMIUM COMPOUNDS
CIRCUIT OPTIMIZATION
FABRICATION
ACOUSTIC SCATTERING
CONDUCTORS
RESONATOR FILTERS

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