Thin metal film characterization and chemical sensors: monitoring electronic conductivity, mass loading and mechanical properties with surface acoustic wave devices
- 1 December 1991
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 206 (1-2), 94-101
- https://doi.org/10.1016/0040-6090(91)90399-i
Abstract
No abstract availableKeywords
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