Sputter deposition of thin films of superconducting Er(RhB)4

Abstract
Thin films of essentially single‐phase ErRh4B4 have been sputter deposited from an arc‐melted target of ErRh4B4 in an ultrahigh‐vacuum system incorporating a liquid‐nitrogen cryogettering can. Optimum conditions for depositing the films were determined. The films exhibit reentrant superconducting transitions with Tc’s somewhat different from those reported for bulk material.

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