Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Frontiers in HWCVD
Home
Publications
Frontiers in HWCVD
Frontiers in HWCVD
R.E.I. Schropp
R.E.I. Schropp
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 April 2009
journal article
Published by
Elsevier
in
Thin Solid Films
Vol. 517
(12)
,
3415-3419
https://doi.org/10.1016/j.tsf.2009.01.038
Abstract
No abstract available
Keywords
I-CVD
DEVICES
SEMICONDUCTORS
CAT-CVD
POLYMERS
THIN FILMS
HOT WIRE CVD
NANOSTRUCTURES
THIN FILM
Cited by 32 articles