Ciliary microactuator array for scanning electron microscope positioning stage

Publisher Website

1 May 1998

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology A

Vol. 16 (3), 1998-2002
https://doi.org/10.1116/1.581209

Abstract

No abstract available

Keywords

SCANNING ELECTRON MICROSCOPE

Cited by 12 articles