Bias sputter deposition of PdAuSi and PdSi: Composition and thermal behavior
- 1 March 1980
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 37 (1), 45-51
- https://doi.org/10.1016/0022-3093(80)90478-0
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Structural imperfections in amorphous metalsJournal of Non-Crystalline Solids, 1978
- Model of bias sputtering applied to the control of Nb film propertiesJournal of Applied Physics, 1978
- Effects of substrate bias and annealing on the properties of amorphous alloy films of Gd-Co, Gd-Fe, and Gd-Co-X (X=Mo,Cu,Au)Journal of Applied Physics, 1978
- Incorporation of rare gases in sputtered amorphous metal filmsJournal of Vacuum Science and Technology, 1977
- Transformation behavior of PdAuSi metallic glassesJournal of Non-Crystalline Solids, 1975
- Impact Evaporation and Thin Film Growth in a Glow DischargePublished by Elsevier ,1963