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Iron Oxide—An Inorganic Photoresist and Mask Material
Home
Publications
Iron Oxide—An Inorganic Photoresist and Mask Material
Iron Oxide—An Inorganic Photoresist and Mask Material
WS
W. Robert Sinclair
W. Robert Sinclair
DR
D. L. Rousseau
D. L. Rousseau
JS
J. J. Stancavish
J. J. Stancavish
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1 January 1974
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 121
(7)
,
925
https://doi.org/10.1149/1.2401954
Abstract
No abstract available
Keywords
IRON OXIDE
MASK MATERIAL
INORGANIC PHOTORESIST
PHOTORESIST AND MASK
Cited by 9 articles