DC reactive sputtering of electro-conductive transparent tin suboxide using a Sn-O2/Ar system
- 1 August 1996
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 281-282, 223-227
- https://doi.org/10.1016/0040-6090(96)08618-x
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Properties of electron-beam-evaporated tin oxide filmsThin Solid Films, 1987
- Electrical and Optical Properties of Chemically Vapour Deposited Fluorine Doped SnO2 FilmsPhysica Status Solidi (a), 1986
- Properties of SnO2:F films prepared on glass substrates by the spraying methodThin Solid Films, 1984
- Thin tin oxide films of low conductivity prepared by chemical vapour depositionThin Solid Films, 1983