Reliability of a capacitance manometer in the range 2×10−4−5×10−6 Torr

Abstract

A capacitance manometer has been tested and compared to the method of volumetric pressure division using helium as a working gas in the range 2×10⁻⁴−5×10⁻⁶ Torr. The results show that the unit tested was linear to the lowest pressures utilized, and the two methods were in agreement to about 0.6% plus 4×10⁻⁷ Torr, in addition to the errors introduced by the least count of the capacitance manometer’s digital readout. Argon and air gave similar results.