The effect of carbonaceous contamination on the investigation of the surface oxide on silicon by angle-resolved XPS
- 1 January 1990
- journal article
- Published by Springer Nature in Microchimica Acta
- Vol. 101 (1-6), 71-80
- https://doi.org/10.1007/bf01244160
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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