The structure of amorphous silicon nitride films
- 1 January 1968
- journal article
- research article
- Published by Wiley in Physica Status Solidi (b)
- Vol. 25 (1), 241-252
- https://doi.org/10.1002/pssb.19680250123
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The Structure of Silicon Oxide FilmsPhysica Status Solidi (b), 1967
- Scanning Electron Diffraction from SolidsNature, 1965
- On the crystal structure of the nitrides of silicon and germaniumActa Crystallographica, 1958
- Collective Energy Losses in SolidsReviews of Modern Physics, 1956