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Deposition of Ultra Fine Particles Using a Gas Jet
Home
Publications
Deposition of Ultra Fine Particles Using a Gas Jet
Deposition of Ultra Fine Particles Using a Gas Jet
SK
Seiichiro Kashu
Seiichiro Kashu
EF
Eiji Fuchita
Eiji Fuchita
TM
Takeshi Manabe
Takeshi Manabe
CH
Chikara Hayashi
Chikara Hayashi
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1 December 1984
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 23
(12A)
,
L910
https://doi.org/10.1143/jjap.23.l910
Abstract
No abstract available
Keywords
TRANSFER AND DEPOSITION
JET
CONTAMINATION
GAS
UFP
MADE
CERAMIC
SUB
Cited by 111 articles