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Mechanical Stress of CVD‐Dielectrics
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Mechanical Stress of CVD‐Dielectrics
Mechanical Stress of CVD‐Dielectrics
MS
M. Stadtmüeller
M. Stadtmüeller
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1 December 1992
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 139
(12)
,
3669-3674
https://doi.org/10.1149/1.2069141
Abstract
No abstract available
Cited by 53 articles