High-transconductance AlInAs/GaInAs HIFETs grown by MOCVD

Abstract
We fabricated a lμm-gate-length heterointerface FET (HIFET) using a selectively doped AlInAs/GaInAs heterostructure grown by atmospheric-pressure MOCVD. The HIFET showed a transconductance as high as 530mS/mm at room temperature. This is the highest measurement of transconductance ever reported in this system.