Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition
- 1 November 1990
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 5 (11), 2351-2355
- https://doi.org/10.1557/jmr.1990.2351
Abstract
We have used x-ray diffraction to characterize diamond films grown in three characteristic morphologies by chemical vapor deposition. Each morphology has a fiber texture about the growth direction; we report the crystal axis aligned in this direction for each morphology. In all cases the average lattice constant agrees with that of bulk diamond; we report the range of strain in each sample.Keywords
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