Pore Creation in Silicon Oxycarbides by Rinsing in Dilute Hydrofluoric Acid
- 1 October 1997
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 9 (10), 2139-2144
- https://doi.org/10.1021/cm970224p
Abstract
No abstract availableKeywords
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