Optical and electrical properties of ZnO films prepared by high rate sputtering
- 21 October 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 108 (3), 325-332
- https://doi.org/10.1016/0040-6090(83)90081-0
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 8 references indexed in Scilit:
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