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A large area substrate heater for ultra high vacuum
Home
Publications
A large area substrate heater for ultra high vacuum
A large area substrate heater for ultra high vacuum
BU
B.A. Unvala
B.A. Unvala
MC
M Censlive
M Censlive
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1 September 1973
journal article
Published by
Elsevier
in
Vacuum
Vol. 23
(9)
,
327-329
https://doi.org/10.1016/0042-207x(73)92118-0
Abstract
No abstract available
Keywords
SUBSTRATE HEATER
AREA SUBSTRATE
HIGH VACUUM
ULTRA HIGH
LARGE AREA
Cited by 3 articles