Shadowed sputtering of gold on V ‐shaped microtrenches etched in silicon and applications in microfabrication
- 1 September 1996
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 8 (9), 765-768
- https://doi.org/10.1002/adma.19960080915
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- Microcontact Printing of Alkanethiols on Silver and Its Application in MicrofabricationJournal of the Electrochemical Society, 1996
- Microcontact Printing of Octadecylsiloxane on the Surface of Silicon Dioxide and Its Application in MicrofabricationJournal of the American Chemical Society, 1995
- Patterned self-assembled monolayers formed by microcontact printing direct selective metalization by chemical vapor deposition on planar and nonplanar substratesLangmuir, 1995
- Reduction in the size of features of patterned SAMs generated by microcontact printing with mechanical compression of the stampAdvanced Materials, 1995
- The Incredible Shrinking LaboratoryScience, 1995
- Synthesis, Structure, and Properties of Model Organic SurfacesAnnual Review of Physical Chemistry, 1992
- Fabrication of microchannels by laser machining and anisotropic etching of siliconSensors and Actuators A: Physical, 1992
- Micromechanical VelcroJournal of Microelectromechanical Systems, 1992
- Fibroblasts on micromachined substrata orient hierarchically to grooves of different dimensionsExperimental Cell Research, 1986
- Wavelength demultiplexer: using echelette gratings on silicon substrateApplied Optics, 1985